An actuator for cleanrooms that is compatible with ISO class 2.5, 3, and 3.5 (ISO 14644-1 standard).
EC Series
EC-S3□CR/DS3□CR EC-S3□ACR/DS3□ACR EC-S4□CR/DS4□CR EC-S4□ACR/DS4□ACR EC-S6□CR/DS6□CR EC-S6□ACR/DS6□ACR EC-S7□CR/DS7□CR EC-S7□ACR/DS7□ACR EC-S8□CR EC-S8□ACR EC-S8X□ACR EC-S6□AHCR/DS6□AHCR EC-S6X□AHCR/DS6X□AHCR EC-S7□AHCR/DS7□AHCR EC-S7X□AHCR/DS7X□AHCR EC-WS10□CR/DWS10□CR EC-WS12□CR/DWS12□CRRCP6CR Series
RCP6CR/RCP6SCR-SA4C RCP6CR/RCP6SCR-SA6C RCP6CR/RCP6SCR-SA7C RCP6CR/RCP6SCR-SA8C RCP6CR/RCP6SCR-WSA10C RCP6CR/RCP6SCR-WSA12C RCP6CR/RCP6SCR-WSA14C RCP6CR/RCP6SCR-WSA16CRCP5CR Series
RCP5CR-SA4C RCP5CR-SA6C RCP5CR-SA7CRCP4CR Series
RCP4CR-SA3C RCP4CR-SA5C RCP4CR-SA6C RCP4CR-SA7CRCACR Series
RCACR-SA4C RCACR-SA5C RCACR-SA6CRCS2CR Series
RCS2CR-SA4C RCS2CR-SA5C RCS2CR-SA6C RCS2CR-SA7CRCS3CR Series
RCS3CR/RCS3PCR-SA8C RCS3CR/RCS3PCR-SS8CRCS4CR Series
RCS4CR-SA4C RCS4CR-SA6C RCS4CR-SA7C RCS4CR-SA8C RCS4CR-WSA10C RCS4CR-WSA12C RCS4CR-WSA14C RCS4CR-WSA16CSSPDACR Series
SSPDACR-S-200 SSPDACR-M-400 SSPDACR-L-750ISDBCR/ISPDBCR Series
ISDBCR/ISPDBCR-S ISDBCR/ISPDBCR-M-100 ISDBCR/ISPDBCR-M-200 ISDBCR/ISPDBCR-MX-200 ISDBCR/ISPDBCR-L-200 ISDBCR/ISPDBCR-L-400 ISDBCR/ISPDBCR-LX-200 ISDBCR/ISPDBCR-LX-400 ISDBCR/ISPDBCR-S-□□□-ESD ISDBCR/ISPDBCR-M-□□□-ESD ISDBCR/ISPDBCR-L-□□□-ESDISDACR/ISPDACR series
ISDACR/ISPDACR-W-600 ISDACR/ISPDACR-W-750 ISDACR/ISPDACR-WX-600 ISDACR/ISPDACR-WX-750RCS2CR series
RCS2CR-RN5NB RCS2CR-RP5NB RCS2CR-GS5NB RCS2CR-GD5NB RCS2CR-SD5NBDDACR series
DDACR-LT18C□A DDACR-LH18C□ARCP2CR series
RCP2CR-GRSS RCP2CR-GRLS RCP2CR-GRS RCP2CR-GRM RCP2CR-GR3SS RCP2CR-GR3SM